Determination of the Concentration of Airborne Ultrafine Particles
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Technical Guide 1002 supplements the coverage of procedures for determining the concentration of ultrafine particles as provided by ISO 14644-1. Procedures presented in this Guide are suitable for classification (in accordance with ISO 14644-1)and monitoring (in accordance with ISO 14644-2) of cleanroom and clean zone environments that would typically qualify as ISO Class 4 or cleaner. This guide describes the apparatus and procedures necessary for determining the U descriptor and provides guidelines and an example format for reporting data.